Micro-LEGO for MEMS
The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabric...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/4/267 |