Development of HfO₂-Based Solar-Blind SAW UV-C Sensor for Corona Discharge Detection Application
This study presents a novel surface acoustic wave (SAW)-based solar-blind ultraviolet-C (UV-C) corona sensor, marking the first reported use of HfO₂ as a sensing material for UV-C corona sensing. A 222 MHz two-port SAW delay line structure was selected as a sensor platform, and its optimal parameter...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2025-01-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/15/1/464 |