Cost-Effective Laboratory Matrix Projection Micro-Lithography System
This paper presents a home-built projection lithographer designed to transfer the image from a DLP (digital light processing) projector MEMS matrix onto the microscope objective’s field of view, where a photoresist-covered substrate is placed. The photoresist is exposed using blue light with a wavel...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-12-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/1/39 |