Aerosol jet printing of piezoelectric surface acoustic wave thermometer
Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the gene...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2023-05-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-023-00492-5 |