Aerosol jet printing of piezoelectric surface acoustic wave thermometer
Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the gene...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2023-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-023-00492-5 |
| _version_ | 1797832038936477696 |
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| author | Nicholas McKibben Blake Ryel Jacob Manzi Florent Muramutsa Joshua Daw Harish Subbaraman David Estrada Zhangxian Deng |
| author_facet | Nicholas McKibben Blake Ryel Jacob Manzi Florent Muramutsa Joshua Daw Harish Subbaraman David Estrada Zhangxian Deng |
| author_sort | Nicholas McKibben |
| collection | DOAJ |
| description | Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO3 substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ∘C. Sensitivities of the printed SAW thermometer are $$-96.9\times 1{0{}^{-6}}^{\circ }$$ − 96.9 × 1 0 − 6 ∘ C−1 and $$-92.0\times 1{0{}^{-6}}^{\circ }$$ − 92.0 × 1 0 − 6 ∘ C−1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers. |
| first_indexed | 2024-04-09T14:02:25Z |
| format | Article |
| id | doaj.art-a2e8d22c2f4349cbbb0a0e8c4bf08b94 |
| institution | Directory Open Access Journal |
| issn | 2055-7434 |
| language | English |
| last_indexed | 2024-04-09T14:02:25Z |
| publishDate | 2023-05-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj.art-a2e8d22c2f4349cbbb0a0e8c4bf08b942023-05-07T11:15:59ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342023-05-019111210.1038/s41378-023-00492-5Aerosol jet printing of piezoelectric surface acoustic wave thermometerNicholas McKibben0Blake Ryel1Jacob Manzi2Florent Muramutsa3Joshua Daw4Harish Subbaraman5David Estrada6Zhangxian Deng7Micron School of Materials Science and Engineering, Boise State UniversityDepartment of Mechanical and Biomedical Engineering, Boise State UniversitySchool of Electrical Engineering and Computer Science, Oregon State UniversityMicron School of Materials Science and Engineering, Boise State UniversityIdaho National LaboratorySchool of Electrical Engineering and Computer Science, Oregon State UniversityMicron School of Materials Science and Engineering, Boise State UniversityDepartment of Mechanical and Biomedical Engineering, Boise State UniversityAbstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO3 substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ∘C. Sensitivities of the printed SAW thermometer are $$-96.9\times 1{0{}^{-6}}^{\circ }$$ − 96.9 × 1 0 − 6 ∘ C−1 and $$-92.0\times 1{0{}^{-6}}^{\circ }$$ − 92.0 × 1 0 − 6 ∘ C−1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.https://doi.org/10.1038/s41378-023-00492-5 |
| spellingShingle | Nicholas McKibben Blake Ryel Jacob Manzi Florent Muramutsa Joshua Daw Harish Subbaraman David Estrada Zhangxian Deng Aerosol jet printing of piezoelectric surface acoustic wave thermometer Microsystems & Nanoengineering |
| title | Aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| title_full | Aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| title_fullStr | Aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| title_full_unstemmed | Aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| title_short | Aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| title_sort | aerosol jet printing of piezoelectric surface acoustic wave thermometer |
| url | https://doi.org/10.1038/s41378-023-00492-5 |
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