Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the gene...

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Bibliographic Details
Main Authors: Nicholas McKibben, Blake Ryel, Jacob Manzi, Florent Muramutsa, Joshua Daw, Harish Subbaraman, David Estrada, Zhangxian Deng
Format: Article
Language:English
Published: Nature Publishing Group 2023-05-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-023-00492-5

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