Influence of Annealing on Gas-Sensing Properties of TiOx Coatings Prepared by Gas Impulse Magnetron Sputtering with Various O<sub>2</sub> Content
TiOx films were prepared by gas impulse magnetron sputtering under oxygen-deficient (ODC) and oxygen-rich conditions (ORC) and annealing at 100–800 °C was used. The O<sub>2</sub> content had an effect on their transparency level (T<sub>λ</sub>). The films from the ORC mode ha...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/3/1724 |