Influence of Annealing on Gas-Sensing Properties of TiOx Coatings Prepared by Gas Impulse Magnetron Sputtering with Various O<sub>2</sub> Content

Influence of Annealing on Gas-Sensing Properties of TiOx Coatings Prepared by Gas Impulse Magnetron Sputtering with Various O<sub>2</sub> Content

TiOx films were prepared by gas impulse magnetron sputtering under oxygen-deficient (ODC) and oxygen-rich conditions (ORC) and annealing at 100–800 °C was used. The O<sub>2</sub> content had an effect on their transparency level (T<sub>λ</sub>). The films from the ORC mode ha...

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Bibliographic Details
Main Authors: Damian Wojcieszak, Paulina Kapuścik, Wojciech Kijaszek
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Applied Sciences
Subjects:
gas-sensing
n or p type of sensor response
amorphous film
TiOx coating
gas impulse magnetron sputtering
annealing
Online Access:https://www.mdpi.com/2076-3417/13/3/1724

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