Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Abstract Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflectio...

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Bibliographic Details
Main Authors: Minchang Wang, Daohan Ge, Liqiang Zhang, Just L. Herder
Format: Article
Language:English
Published: SpringerOpen 2021-09-01
Series:Chinese Journal of Mechanical Engineering
Subjects:
Compliant micromechanism
Manufacturing process
Constituent material
Online Access:https://doi.org/10.1186/s10033-021-00606-y

Internet

https://doi.org/10.1186/s10033-021-00606-y

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