Combinatorial Study of Phase Composition, Microstructure and Mechanical Behavior of Co-Cr-Fe-Ni Nanocrystalline Film Processed by Multiple-Beam-Sputtering Physical Vapor Deposition

Combinatorial Study of Phase Composition, Microstructure and Mechanical Behavior of Co-Cr-Fe-Ni Nanocrystalline Film Processed by Multiple-Beam-Sputtering Physical Vapor Deposition

A combinatorial Co-Cr-Fe-Ni compositional complex alloy (CCA) thin film disk with a thickness of 1 µm and a diameter of 10 cm was processed by multiple-beam-sputtering physical vapor deposition (PVD) using four pure metal sources. The chemical composition of the four constituent elements varied betw...

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Bibliographic Details
Main Authors: Péter Nagy, Nadia Rohbeck, Remo N. Widmer, Zoltán Hegedűs, Johann Michler, László Pethö, János L. Lábár, Jenő Gubicza
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Materials
Subjects:
multiple-beam-sputtering physical vapor deposition
compositional complex alloy
microstructure
hardness
elastic modulus
Online Access:https://www.mdpi.com/1996-1944/15/6/2319

Internet

https://www.mdpi.com/1996-1944/15/6/2319

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