Diagnostics of dusty plasma properties in planar magnetron sputtering device
The effect of Al dust particles on glow discharge regions, discharge voltage, discharge current, plasma potential, floating potential, electron density and electron temperature in planar magnetron sputtering device has been studied experimentally. Four cylindrical Langmuir probes were employed to m...
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| Format: | Article |
| Language: | English |
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University of Baghdad
2019-02-01
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| Series: | Iraqi Journal of Physics |
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| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/285 |