Impact of Deposition Power and Gas Flow Ratio on the Tribological Properties of Titanium Vanadium Nitride Thin Films
Magnetron sputtering was used for producing titanium vanadium nitride (TiVN) coatings on brass substrates. In this research, we investigate how changing the sputtering power and nitrogen:argon (N<sub>2</sub>:Ar) gas ratio affects the structural and tribological properties of TiVN coating...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/9/1788 |