Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

This study aims to discuss the combined theoretical and experimental results of elastic properties of tungsten trioxide films supported on Quartz (YX)/45°/10° resonator to form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses of WO<sub>3</sub> thin films we...

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Bibliographic Details
Main Authors: Madjid Arab, Véronique Madigou, Virginie Chevallier, Christian Turquat, Christine Leroux
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Electronic Materials
Subjects:
acoustic resonator
tungsten trioxide
harmonic admittance
dielectric properties
gravimetric effect
Online Access:https://www.mdpi.com/2673-3978/3/1/12

Internet

https://www.mdpi.com/2673-3978/3/1/12

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