Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices
This study aims to discuss the combined theoretical and experimental results of elastic properties of tungsten trioxide films supported on Quartz (YX)/45°/10° resonator to form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses of WO<sub>3</sub> thin films we...
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MDPI AG
2022-03-01
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| author | Madjid Arab Véronique Madigou Virginie Chevallier Christian Turquat Christine Leroux |
| author_facet | Madjid Arab Véronique Madigou Virginie Chevallier Christian Turquat Christine Leroux |
| author_sort | Madjid Arab |
| collection | DOAJ |
| description | This study aims to discuss the combined theoretical and experimental results of elastic properties of tungsten trioxide films supported on Quartz (YX)/45°/10° resonator to form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses of WO<sub>3</sub> thin films were imaged and structurally characterized by X-ray diffraction, atomic force, and transmission electron microscopy. The deposited WO<sub>3</sub> films (100, 200, and 300 nm of thickness) crystallized in a single monoclinic phase. The acoustoelectric properties of the SAW system were obtained by combining theoretical simulations with experimental measurements. The modeling of the SAW devices has been performed by the finite element and boundary element methods (FEM/BEM). The elastic constants of the films at room temperature were assessed via electrical admittances experiments in light of theoretical calculations. The gravimetric effect of the deposited layers is observed by a shift of the resonance frequency to lower values as the thickness of the films increases. Moreover, the acoustic losses are affected by the dielectric losses of the WO<sub>3</sub> films while the resonant frequency decreases almost linearly. SAW devices revealed strong displacement fields with low acoustic losses as a function of WO<sub>3</sub> thicknesses. For all the deposited layers, the measured Young’s moduli and Poisson’s ratios are 8 GPa and 0.5, respectively. |
| first_indexed | 2024-03-09T19:55:17Z |
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| issn | 2673-3978 |
| language | English |
| last_indexed | 2024-03-09T19:55:17Z |
| publishDate | 2022-03-01 |
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| record_format | Article |
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| spelling | doaj.art-a385a7cbed784214aaf2e33cf624715a2023-11-24T00:59:59ZengMDPI AGElectronic Materials2673-39782022-03-013112413510.3390/electronicmat3010012Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing DevicesMadjid Arab0Véronique Madigou1Virginie Chevallier2Christian Turquat3Christine Leroux4Aix Marseille Univ, Université de Toulon, CNRS, IM2NP, CS 60584, Toulon Cedex 9, F-83041, FranceAix Marseille Univ, Université de Toulon, CNRS, IM2NP, CS 60584, Toulon Cedex 9, F-83041, FranceAix Marseille Univ, Université de Toulon, CNRS, IM2NP, CS 60584, Toulon Cedex 9, F-83041, FranceAix Marseille Univ, Université de Toulon, CNRS, IM2NP, CS 60584, Toulon Cedex 9, F-83041, FranceAix Marseille Univ, Université de Toulon, CNRS, IM2NP, CS 60584, Toulon Cedex 9, F-83041, FranceThis study aims to discuss the combined theoretical and experimental results of elastic properties of tungsten trioxide films supported on Quartz (YX)/45°/10° resonator to form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses of WO<sub>3</sub> thin films were imaged and structurally characterized by X-ray diffraction, atomic force, and transmission electron microscopy. The deposited WO<sub>3</sub> films (100, 200, and 300 nm of thickness) crystallized in a single monoclinic phase. The acoustoelectric properties of the SAW system were obtained by combining theoretical simulations with experimental measurements. The modeling of the SAW devices has been performed by the finite element and boundary element methods (FEM/BEM). The elastic constants of the films at room temperature were assessed via electrical admittances experiments in light of theoretical calculations. The gravimetric effect of the deposited layers is observed by a shift of the resonance frequency to lower values as the thickness of the films increases. Moreover, the acoustic losses are affected by the dielectric losses of the WO<sub>3</sub> films while the resonant frequency decreases almost linearly. SAW devices revealed strong displacement fields with low acoustic losses as a function of WO<sub>3</sub> thicknesses. For all the deposited layers, the measured Young’s moduli and Poisson’s ratios are 8 GPa and 0.5, respectively.https://www.mdpi.com/2673-3978/3/1/12acoustic resonatortungsten trioxideharmonic admittancedielectric propertiesgravimetric effect |
| spellingShingle | Madjid Arab Véronique Madigou Virginie Chevallier Christian Turquat Christine Leroux Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices Electronic Materials acoustic resonator tungsten trioxide harmonic admittance dielectric properties gravimetric effect |
| title | Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices |
| title_full | Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices |
| title_fullStr | Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices |
| title_full_unstemmed | Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices |
| title_short | Investigation of Elastic Properties of WO<sub>3</sub> Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices |
| title_sort | investigation of elastic properties of wo sub 3 sub thin films supported on quartz in surface acoustic wave sensing devices |
| topic | acoustic resonator tungsten trioxide harmonic admittance dielectric properties gravimetric effect |
| url | https://www.mdpi.com/2673-3978/3/1/12 |
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