Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls
Diamond single crystals have garnered significant attention due to their wide-ranging applications, encompassing not only semiconducting films but also potential quantum sensing materials. The hot-filament activated chemical vapor deposition (HFCVD) technique has been extensively employed to produce...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2023-12-01
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| Series: | Functional Diamond |
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| Online Access: | http://dx.doi.org/10.1080/26941112.2023.2259941 |