Comparison of sputtering and atomic layer deposition based ultra-thin alumina protective layers for high temperature surface acoustic wave devices
Surface acoustic wave (SAW) can be used as passive wireless sensors in high temperature environments. For such applications, protective layers are crucial and important for the SAW sensors. In this paper, ultra-thin Al2O3 layers prepared by atomic layer deposition (ALD) and RF magnetron sputtering w...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-11-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785421012163 |