Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock
Micro-electromechanical system (MEMS) suspended inductors have been widely studied in recent decades because of their excellent radio frequency performance. However, the deformation of the inductor coil and the performance variation usually occur to the MEMS suspended inductors when the inductors ar...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/10/686 |