Improvement in Instability of Transparent ALD ZnO TFTs Under Negative Bias Illumination Stress With SiO/AlO Bilayer Dielectric<sub/><sub/><sub/>
The theory of oxygen vacancy related deep energy defects and valence band offset (VBO) between gate insulator and channel codetermining the threshold voltage shift <inline-formula> <tex-math notation="LaTeX">$(\Delta {V}_{\mathbf {\mathrm {TH}}})$ </tex-math></inline-f...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2022-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9913213/ |