Fabrication of Micro-Scale Gratings by Nanosecond Laser and Its Applications for Deformation Measurements

Fabrication of Micro-Scale Gratings by Nanosecond Laser and Its Applications for Deformation Measurements

This paper experimentally investigated the fabrication and optimization of micro-scale gratings formed by nanosecond laser etching. The mechanism of nanosecond laser processing and the geometric phase analysis (GPA) are discussed, and the factors influencing the fabrication process including laser e...

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Bibliographic Details
Main Authors: Guanbao Yang, Wei He, Jianguo Zhu, Lei Chen
Format: Article
Language:English
Published: MDPI AG 2017-04-01
Series:Micromachines
Subjects:
grating fabrication
nanosecond laser
geometric phase analysis
deformation measurement
Online Access:http://www.mdpi.com/2072-666X/8/5/136

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http://www.mdpi.com/2072-666X/8/5/136

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