Study on Preparation and Processing Properties of Mechano-Chemical Micro-Grinding Tools
The application of hard and brittle materials such as single-crystal silicon in small parts has expanded sharply, and the requirements for their dimensional accuracy and processing surface quality have been continuously improved. This paper proposes using mechano-chemical micro-grinding tools to pro...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/11/6599 |