Ultra-Low-Loss and Broadband All-Silicon Dielectric Waveguides for WR-1 Band (0.75–1.1 THz) Modules
This study presents ultra-low-loss and broadband all-silicon dielectric waveguides for the WR-1 band (0.75–1.1 THz). The waveguides are built in high-resistivity silicon (10 kΩ-cm) and integrated with supportive frames fabricated from the same silicon wafer in a single etch process to achieve a comp...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-07-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/9/8/515 |