Ultra-Low-Loss and Broadband All-Silicon Dielectric Waveguides for WR-1 Band (0.75–1.1 THz) Modules

This study presents ultra-low-loss and broadband all-silicon dielectric waveguides for the WR-1 band (0.75–1.1 THz). The waveguides are built in high-resistivity silicon (10 kΩ-cm) and integrated with supportive frames fabricated from the same silicon wafer in a single etch process to achieve a comp...

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Bibliographic Details
Main Authors: Ratmalgre Koala, Ryoma Maru, Kei Iyoda, Li Yi, Masayuki Fujita, Tadao Nagatsuma
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Photonics
Subjects:
Online Access:https://www.mdpi.com/2304-6732/9/8/515