Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators

Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators

An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focused on a model for the thermoelastic damping devel...

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Bibliographic Details
Main Authors: Florina Serdean, Marius Pustan, Cristian Dudescu, Corina Birleanu, Mihai Serdean
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Mathematics
Subjects:
MEMS resonator
thermoelastic damping
analytical model
polysilicon microbridge
electrostatic actuation
Online Access:https://www.mdpi.com/2227-7390/8/7/1124

Internet

https://www.mdpi.com/2227-7390/8/7/1124

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