Additional Siconi™ pre-clean for reliable TiSix contacts in advanced imager technologies
In the frame of advanced imager technology development, Ti-silicide direct contacts are commonly used in the device integration in the very near environment of pixel area. Therefore, a low resistivity, high yield, and reliability are the principal requirements for these integrated contacts. As previ...
| Glavni autori: | , , , , , |
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| Format: | Članak |
| Jezik: | English |
| Izdano: |
Elsevier
2019-03-01
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| Serija: | Micro and Nano Engineering |
| Online pristup: | http://www.sciencedirect.com/science/article/pii/S259000721930005X |