Fabrication and Characterization of a High-Performance Multi-Annular Backscattered Electron Detector for Desktop SEM

Fabrication and Characterization of a High-Performance Multi-Annular Backscattered Electron Detector for Desktop SEM

Scanning electron microscopy has been developed for topographic analysis at the nanometer scale. Herein, we present a silicon p-n diode with multi-annular configuration to detect backscattering electrons (BSE) in a homemade desktop scanning electron microscope (SEM). The multi-annular configuration...

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Bibliographic Details
Main Authors: Wei-Ruei Lin, Yun-Ju Chuang, Chih-Hao Lee, Fan-Gang Tseng, Fu-Rong Chen
Format: Article
Language:English
Published: MDPI AG 2018-09-01
Series:Sensors
Subjects:
backscattered electron detector
desktop scanning electron microscope
surface topography
Online Access:http://www.mdpi.com/1424-8220/18/9/3093

Internet

http://www.mdpi.com/1424-8220/18/9/3093

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