Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process

Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process

This paper presents the fabrication and characterization of energy harvesting thermoelectric micro generators using the commercial complementary metal oxide semiconductor (CMOS) process. The micro generator consists of 33 thermocouples in series. Thermocouple materials are p-type and n-type polysili...

Full description

Bibliographic Details
Main Authors: Wen-Jung Tsai, Ming-Zhi Yang, Ching-Liang Dai, Chyan-Chyi Wu
Format: Article
Language:English
Published: MDPI AG 2013-02-01
Series:Sensors
Subjects:
energy harvesting
thermoelectric generator
thermocouple
CMOS
Online Access:http://www.mdpi.com/1424-8220/13/2/2359

Internet

http://www.mdpi.com/1424-8220/13/2/2359

Similar Items