A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes

A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes

This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensi...

Full description

Bibliographic Details
Main Authors: Mohannad Y. Elsayed, Frederic Nabki, Mourad N. El-Gamal
Format: Article
Language:English
Published: MDPI AG 2013-12-01
Series:Sensors
Subjects:
MEMS
resonant gyroscopes
bulk-mode
sensitivity enhancement
Online Access:http://www.mdpi.com/1424-8220/13/12/16641

Internet

http://www.mdpi.com/1424-8220/13/12/16641

Similar Items