A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes
This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2013-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/12/16641 |
| _version_ | 1798041876821966848 |
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| author | Mohannad Y. Elsayed Frederic Nabki Mourad N. El-Gamal |
| author_facet | Mohannad Y. Elsayed Frederic Nabki Mourad N. El-Gamal |
| author_sort | Mohannad Y. Elsayed |
| collection | DOAJ |
| description | This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensitivity improvement. The architecture is targeted for technologies with ~100 nm transducer gaps in order to achieve very high performance devices. In this work, this sensitivity enhancement concept was implemented in SOIMUMPs, a commercial relatively large gap technology. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/s, corresponding to a capacitance sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs, fabricated in the same technology. |
| first_indexed | 2024-04-11T22:27:40Z |
| format | Article |
| id | doaj.art-a4bddbf8409c4a458914866701018cf7 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T22:27:40Z |
| publishDate | 2013-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a4bddbf8409c4a458914866701018cf72022-12-22T03:59:36ZengMDPI AGSensors1424-82202013-12-011312166411665610.3390/s131216641s131216641A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode GyroscopesMohannad Y. Elsayed0Frederic Nabki1Mourad N. El-Gamal2Department of Electrical and Computer Engineering, McGill University, Montréal, Québec H3A 0E9, CanadaDepartment of Computer Science, Université du Québec à Montréal, Montréal, Québec H3C 3P8, CanadaDepartment of Electrical and Computer Engineering, McGill University, Montréal, Québec H3A 0E9, CanadaThis work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensitivity improvement. The architecture is targeted for technologies with ~100 nm transducer gaps in order to achieve very high performance devices. In this work, this sensitivity enhancement concept was implemented in SOIMUMPs, a commercial relatively large gap technology. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/s, corresponding to a capacitance sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs, fabricated in the same technology.http://www.mdpi.com/1424-8220/13/12/16641MEMSresonant gyroscopesbulk-modesensitivity enhancement |
| spellingShingle | Mohannad Y. Elsayed Frederic Nabki Mourad N. El-Gamal A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes Sensors MEMS resonant gyroscopes bulk-mode sensitivity enhancement |
| title | A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes |
| title_full | A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes |
| title_fullStr | A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes |
| title_full_unstemmed | A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes |
| title_short | A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes |
| title_sort | novel comb architecture for enhancing the sensitivity of bulk mode gyroscopes |
| topic | MEMS resonant gyroscopes bulk-mode sensitivity enhancement |
| url | http://www.mdpi.com/1424-8220/13/12/16641 |
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