A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold

A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold

Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of minutes due to the relatively low heating and coo...

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Bibliographic Details
Main Authors: Xinxin Fu, Qian Chen, Xinyu Chen, Liang Zhang, Aibin Yang, Yushuang Cui, Changsheng Yuan, Haixiong Ge
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Micromachines
Subjects:
thermal nanoimprint lithography
rapid heating
induction heating
nickel mold
Online Access:https://www.mdpi.com/2072-666X/10/5/334

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https://www.mdpi.com/2072-666X/10/5/334

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