Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
Abstract We present a new approach to tuning-fork-based atomic force microscopy for utilizing advanced “tip-on-chip” probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 × 2 mm2 drastically perturb the oscillation of the tuning fork, resulting i...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00379-x |