High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical e...

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Bibliographic Details
Main Authors: Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang, Zhanying Wang
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Micromachines
Subjects:
microelectromechanical systems
cantilever beam
piezoelectric accelerometer
vector hydrophone
sensitivity
Online Access:https://www.mdpi.com/2072-666X/14/8/1598

Internet

https://www.mdpi.com/2072-666X/14/8/1598

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