Enhancing the adhesion and tribological performance of Si-DLC film on NBR by Ar plasma pretreatment under a high bias

Silicon-containing diamond-like carbon (Si-DLC) films were successfully deposited on nitrile-butadiene rubber (NBR) via magnetron sputtering Si target in Ar and CH4 mixture atmosphere. The influence of Ar plasma pretreatment bias on the adhesion and tribological properties of the Si-DLC coated NBR w...

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Bibliographic Details
Main Authors: Li Qiang, Changning Bai, Aimin Liang, Junyan Zhang
Format: Article
Language:English
Published: AIP Publishing LLC 2019-01-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5063365