Enhancing the adhesion and tribological performance of Si-DLC film on NBR by Ar plasma pretreatment under a high bias
Silicon-containing diamond-like carbon (Si-DLC) films were successfully deposited on nitrile-butadiene rubber (NBR) via magnetron sputtering Si target in Ar and CH4 mixture atmosphere. The influence of Ar plasma pretreatment bias on the adhesion and tribological properties of the Si-DLC coated NBR w...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-01-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5063365 |