Monitoring and meaning of vibrations in robot polishing
Robot polishing is increasingly used in the production of high-end glass work pieces such as astronomy mirrors, lithography lenses, laser gyroscopes or high-precision coordinate measuring machines. The quality of optical components such as lenses or mirrors can be described by shape errors and surfa...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | Journal of the European Optical Society-Rapid Publications |
| Subjects: | |
| Online Access: | https://jeos.edpsciences.org/articles/jeos/full_html/2023/01/jeos20210010/jeos20210010.html |