Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology

This paper presents a CMOS-integrated dot avalanche photodiode (dot-APD) that features a small central n<sup>+</sup>/p-well hemispherical cathode/p-well structure circularly surrounded by an anode ring. The dot-APD enables wide hemispherical depletion, charge collection from a large volu...

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Main Authors: Seyed Saman Kohneh Poushi, Bernhard Goll, Kerstin Schneider-Hornstein, Michael Hofbauer, Horst Zimmermann
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/7/3403
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author Seyed Saman Kohneh Poushi
Bernhard Goll
Kerstin Schneider-Hornstein
Michael Hofbauer
Horst Zimmermann
author_facet Seyed Saman Kohneh Poushi
Bernhard Goll
Kerstin Schneider-Hornstein
Michael Hofbauer
Horst Zimmermann
author_sort Seyed Saman Kohneh Poushi
collection DOAJ
description This paper presents a CMOS-integrated dot avalanche photodiode (dot-APD) that features a small central n<sup>+</sup>/p-well hemispherical cathode/p-well structure circularly surrounded by an anode ring. The dot-APD enables wide hemispherical depletion, charge collection from a large volume, and a small multiplication region. These features result in a large light-sensitive area, high responsivity and bandwidth, and exceptionally low junction capacitance. The active area can be further expanded using a multi-dot structure, which is an array of several cathode/p-well dots with a shared anode. Experimental results show that a 5 × 5 multi-dot APD with an active area of 70 μm × 70 μm achieves a bandwidth of 1.8 GHz, a responsivity of 9.7 A/W, and a capacitance of 27 fF. The structure of the multi-dot APD allows for the design of APDs in various sizes that offer high bandwidth and responsivity as an optical detector for various applications while still maintaining a small capacitance.
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spelling doaj.art-a6043fa155c44cd48feb0d0e11148c1d2023-11-17T17:32:01ZengMDPI AGSensors1424-82202023-03-01237340310.3390/s23073403Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS TechnologySeyed Saman Kohneh Poushi0Bernhard Goll1Kerstin Schneider-Hornstein2Michael Hofbauer3Horst Zimmermann4Institute of Electrodynamics, Microwave and Circuit Engineering, Vienna University of Technology, 1040 Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Vienna University of Technology, 1040 Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Vienna University of Technology, 1040 Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Vienna University of Technology, 1040 Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Vienna University of Technology, 1040 Vienna, AustriaThis paper presents a CMOS-integrated dot avalanche photodiode (dot-APD) that features a small central n<sup>+</sup>/p-well hemispherical cathode/p-well structure circularly surrounded by an anode ring. The dot-APD enables wide hemispherical depletion, charge collection from a large volume, and a small multiplication region. These features result in a large light-sensitive area, high responsivity and bandwidth, and exceptionally low junction capacitance. The active area can be further expanded using a multi-dot structure, which is an array of several cathode/p-well dots with a shared anode. Experimental results show that a 5 × 5 multi-dot APD with an active area of 70 μm × 70 μm achieves a bandwidth of 1.8 GHz, a responsivity of 9.7 A/W, and a capacitance of 27 fF. The structure of the multi-dot APD allows for the design of APDs in various sizes that offer high bandwidth and responsivity as an optical detector for various applications while still maintaining a small capacitance.https://www.mdpi.com/1424-8220/23/7/3403CMOS-integrated dot avalanche photodiodemulti-dot APDradial charge collectionactive area enlargementbandwidth enhancement
spellingShingle Seyed Saman Kohneh Poushi
Bernhard Goll
Kerstin Schneider-Hornstein
Michael Hofbauer
Horst Zimmermann
Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
Sensors
CMOS-integrated dot avalanche photodiode
multi-dot APD
radial charge collection
active area enlargement
bandwidth enhancement
title Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
title_full Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
title_fullStr Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
title_full_unstemmed Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
title_short Area and Bandwidth Enhancement of an n<sup>+</sup>/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology
title_sort area and bandwidth enhancement of an n sup sup p well dot avalanche photodiode in 0 35 μm cmos technology
topic CMOS-integrated dot avalanche photodiode
multi-dot APD
radial charge collection
active area enlargement
bandwidth enhancement
url https://www.mdpi.com/1424-8220/23/7/3403
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