Experimental evaluation on the silicon mechanical performance of electronic packaging

Semiconductor packaging is trending towards a miniaturisation in size but an increase in functionality. Hence, the thickness of the silicon wafer has decreased dramatically with a concern on the possible degradation of the strength of the thinned wafer. In this paper, 3point bend (3PB) on bare silic...

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Bibliographic Details
Main Authors: W. Fong, K.L. Koay, I.A. Azid
Format: Article
Language:English
Published: Universiti Malaysia Pahang Publishing 2017-03-01
Series:Journal of Mechanical Engineering and Sciences
Subjects:
Online Access:https://journal.ump.edu.my/jmes/article/view/7991