Beyond conventional secondary electron imaging using spectromicroscopy and its applications in dopant profiling
Despite decades of research, the technique of measuring dopant concentration by the scanning electron microscope (SEM) has so far been limited to probing idealized test pn junction specimens, where only step dopant concentrations have been quantified. This article presents experimental results to de...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-06-01
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| Series: | Materials Today Advances |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590049819300864 |