Diagnostics of impurity composition of high-purity monosilane by results of the analysis of a test silicon single crystal
Elements the 3 and 5 of groups of the Periodic System and carbon are the most important impurities in silicon. The estimation technique of carbon, boron and phosphorus impurity content in high-purity monosilane has been proposed. The technique involves the preparation of polycrystalline silicon by s...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2016-12-01
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| Series: | Modern Electronic Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2452177916300822 |