Magnetic characteristics of LaMnO3+δ thin films deposited by RF magnetron sputtering in an O2/Ar mixture gas
In this work, LaMnO _3+ _δ thin films have been successfully fabricated by RF magnetron sputtering using different O _2 /Ar flux ratios. The crystal structures, morphologies, stoichiometry, surface chemical states and magnetic properties of films are thoroughly characterized by x-ray powder diffract...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2021-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/abd6a3 |