“Microstructured Nanostructures†– Nanostructuring by Means of Conventional Photolithography and Layer-expansion Technique

“Microstructured Nanostructures†– Nanostructuring by Means of Conventional Photolithography and Layer-expansion Technique

A new and simple method for nanostructuring using conventionalphotolithography and layer expansion or pattern-size reduction technique is presented, whichcan further be applied for the fabrication of different nanostructures and nano-devices. Themethod is based on the conversion of a photolithograph...

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Bibliographic Details
Main Authors: Michael J. Schöning, Arshak Poghossian, Johannes Platen
Format: Article
Language:English
Published: MDPI AG 2006-04-01
Series:Sensors
Subjects:
Nanostructuring
layer expansion
pattern-size reduction
self-aligned patterning.
Online Access:http://www.mdpi.com/1424-8220/6/4/361/

Internet

http://www.mdpi.com/1424-8220/6/4/361/

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