Charge Density-Based Pyroelectric Vacuum Sensor

Charge Density-Based Pyroelectric Vacuum Sensor

A traditional thermal conductivity vacuum gauge mainly detects low pressure (the degree of vacuum) by measuring the temperature change of a filament heated by the electric current. We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelect...

書誌詳細
主要な著者:	Lan Xu, Geng Huangfu, Yiping Guo, Ya Yang
フォーマット:	論文
言語:	English
出版事項:	American Association for the Advancement of Science (AAAS) 2023-01-01
シリーズ:	Research
オンライン･アクセス:	https://spj.science.org/doi/10.34133/research.0028

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