Comparative study of Al-doped ZnO films deposited by sol–gel and by sputtering using a sintered target from ZnO nanoparticles synthesized by sol–gel
Al-doped zinc oxide (ZnO) films were deposited on glass substrates by radio frequency magnetron sputtering using a sintered target of nanoparticles synthesized by sol–gel. The films were characterized using X-ray diffraction, scanning electron microscopy, the four-point probe method for resistivity,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-03-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0366317521001072 |