Analytical Gas‐Sensing Responses for Single‐Crystalline Semiconducting Gas Sensors
Abstract In this study, an analytical gas response formula is developed based on the classical gaseous molecule adsorption model. To validate the analytical formula, an array of silicon nanowires or microwires is fabricated by patterning the device layer of a silicon‐on‐insulator (SOI) wafer. Gas Ha...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2023-12-01
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| Series: | Advanced Sensor Research |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/adsr.202300071 |