Research on AlN thin film microstructure processing technology based on ultra-thin cantilever beam structure
Aiming at the problem of poor solution selection ratio when the AlN film and porous silicon sacrificial layer are released in the ultra-thin cantilever structure and at the problem of large surface roughness after AlN graphing, the wet corrosion process parameters were optimized, and the influence o...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0132910 |