High-frequency plasma at atmospheric pressure as a means of deposition of thin films
The main units of the industrial high-frequency generator have been modernized. The design and technical coordination of the plasma torch impedance was developed in order to obtain high-frequency plasma with capacitive coupling for the transmission of electrical energy at atmospheric pressure. The...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Zhytomyr Polytechnic State University
2019-12-01
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| Series: | Технічна інженерія |
| Subjects: | |
| Online Access: | http://ten.ztu.edu.ua/article/view/186558/186088 |