Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment
Amid the ongoing emphasis on reducing manufacturing costs and enhancing productivity, one of the crucial objectives when manufacturing is to maintain process tools in optimal operating conditions. With advancements in sensing technologies, large amounts of data are collected during manufacturing pro...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-11-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/22/9099 |