Combinatorial Synthesis and Ionic Conductivity of Amorphous Oxynitrides in a Pseudo-ternary Li3PO4-Li4SiO4-LiAlO2 System
A combinatorial synthesis system consisting of co-sputtering multiple radio frequency (RF) cathodes was developed to investigate the presence of new amorphous solid electrolytes in a pseudo-ternary Li3PO4-Li4SiO4-LiAlO2 system. Oxynitride solid-electrolyte films were synthesized under an N2 atmosphe...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
The Electrochemical Society of Japan
2022-03-01
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Series: | Electrochemistry |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/electrochemistry/90/3/90_22-00002/_html/-char/en |