Combinatorial Synthesis and Ionic Conductivity of Amorphous Oxynitrides in a Pseudo-ternary Li3PO4-Li4SiO4-LiAlO2 System

A combinatorial synthesis system consisting of co-sputtering multiple radio frequency (RF) cathodes was developed to investigate the presence of new amorphous solid electrolytes in a pseudo-ternary Li3PO4-Li4SiO4-LiAlO2 system. Oxynitride solid-electrolyte films were synthesized under an N2 atmosphe...

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Bibliographic Details
Main Authors: Shunsuke SASAKI, Atsuo ONO, Akiyoshi SUZUKI, Masaki TAKEI, Kota SUZUKI, Masaaki HIRAYAMA, Ryoji KANNO
Format: Article
Language:English
Published: The Electrochemical Society of Japan 2022-03-01
Series:Electrochemistry
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/electrochemistry/90/3/90_22-00002/_html/-char/en