Development of deposition technology and AC measurement of copper ultrathin layers
In this paper, the transport properties of discontinuous 4 nm copper layers obtained by dual-source non-reactive magnetron sputtering in the presence of argon are presented. The value of resistance and capacitance of the current parallel to the plane of these layers can be adjusted independently by...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Lublin University of Technology
2022-03-01
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| Series: | Informatyka, Automatyka, Pomiary w Gospodarce i Ochronie Środowiska |
| Subjects: | |
| Online Access: | https://ph.pollub.pl/index.php/iapgos/article/view/2888 |