Effects of Carbon Incorporation on Electrical Characteristics and Thermal Stability of Ti/TiO<sub>2</sub>/<italic>n</italic>-Ge MIS Contact

Effects of Carbon Incorporation on Electrical Characteristics and Thermal Stability of Ti/TiO<sub>2</sub>/<italic>n</italic>-Ge MIS Contact

The effects of carbon incorporation on the thermal stability of the interfacial TiO<sub>2</sub> layer and the electrical characteristics of Ti/TiO<sub>2</sub>/ <italic>n-</italic>Ge contacts were investigated. The improved thermal stability and contact characteris...

Full description

Bibliographic Details
Main Authors: Iksoo Park, Seonghwan Shin, Jungsik Kim, Bo Jin, Jeong-Soo Lee
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Germanium
metal–insulator–semiconductor
thermal stability
Schottky barrier height
Fermi-level pinning
contact resistivity
Online Access:https://ieeexplore.ieee.org/document/9853537/

Internet

https://ieeexplore.ieee.org/document/9853537/

Similar Items