A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films
Abstract Piezoelectric materials are key components for applications including non‐destructive testing, medical imaging, energy harvesting, ultrasonic sensors, and actuators. Among different materials exhibiting piezoelectricity, crystalline thin films are proposed as alternative candidates to repla...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Wiley-VCH
2024-03-01
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| Series: | Advanced Physics Research |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/apxr.202300091 |
| _version_ | 1797270023879786496 |
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| author | Manuel Pelayo Garcia Desmond Gibson Dave Allan Hughes Carlos Garcia Nuñez |
| author_facet | Manuel Pelayo Garcia Desmond Gibson Dave Allan Hughes Carlos Garcia Nuñez |
| author_sort | Manuel Pelayo Garcia |
| collection | DOAJ |
| description | Abstract Piezoelectric materials are key components for applications including non‐destructive testing, medical imaging, energy harvesting, ultrasonic sensors, and actuators. Among different materials exhibiting piezoelectricity, crystalline thin films are proposed as alternative candidates to replace ceramics due to their high integrability in micro‐/nano‐scale devices and compatibility with non‐conventional flexible/wearable substrates. To measure the piezoelectric response, Berlincourt (BC) quasi‐static method is proposed as one of the simplest, however for thin films this method has not yet been explored in sufficient detail. This paper reports the effects of measuring BC parameters on the resulting piezoelectric coefficient (d33) of sputter deposited ZnO with the shape of standard and inclined nanostructured thin films. Results provide comprehensive, reliable and repeatable information about true piezoelectric coefficient of thin films (6.0 ± 0.1 pC N−1 for standard; 24 ± 1 pC N−1 for inclined films) by selecting optimized parameters in BC measurements, including dynamic force (0.45 Npp), static force (1 N) and frequency (110 Hz), utilizing the protocol here named Method 2 for clamping the film, and measuring after the stage of high variability has passed (t >1200 s). Additionally, this modified BC has allowed the indirect estimation of stress accumulated in the ZnO lattice during measurements, offering a reliable and repeatable method for the determination of true d33 in crystalline thin films. |
| first_indexed | 2024-04-25T01:57:41Z |
| format | Article |
| id | doaj.art-a804e1ec7e1542d4a3d4e6e87b17a85a |
| institution | Directory Open Access Journal |
| issn | 2751-1200 |
| language | English |
| last_indexed | 2024-04-25T01:57:41Z |
| publishDate | 2024-03-01 |
| publisher | Wiley-VCH |
| record_format | Article |
| series | Advanced Physics Research |
| spelling | doaj.art-a804e1ec7e1542d4a3d4e6e87b17a85a2024-03-07T15:43:41ZengWiley-VCHAdvanced Physics Research2751-12002024-03-0133n/an/a10.1002/apxr.202300091A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin FilmsManuel Pelayo Garcia0Desmond Gibson1Dave Allan Hughes2Carlos Garcia Nuñez3Institute of Thin Films, Sensors and Imaging University of the West of Scotland Paisley PA1 2BE UKInstitute of Thin Films, Sensors and Imaging University of the West of Scotland Paisley PA1 2BE UKNovosound Ltd Motherwell ML1 5UH UKInstitute of Thin Films, Sensors and Imaging University of the West of Scotland Paisley PA1 2BE UKAbstract Piezoelectric materials are key components for applications including non‐destructive testing, medical imaging, energy harvesting, ultrasonic sensors, and actuators. Among different materials exhibiting piezoelectricity, crystalline thin films are proposed as alternative candidates to replace ceramics due to their high integrability in micro‐/nano‐scale devices and compatibility with non‐conventional flexible/wearable substrates. To measure the piezoelectric response, Berlincourt (BC) quasi‐static method is proposed as one of the simplest, however for thin films this method has not yet been explored in sufficient detail. This paper reports the effects of measuring BC parameters on the resulting piezoelectric coefficient (d33) of sputter deposited ZnO with the shape of standard and inclined nanostructured thin films. Results provide comprehensive, reliable and repeatable information about true piezoelectric coefficient of thin films (6.0 ± 0.1 pC N−1 for standard; 24 ± 1 pC N−1 for inclined films) by selecting optimized parameters in BC measurements, including dynamic force (0.45 Npp), static force (1 N) and frequency (110 Hz), utilizing the protocol here named Method 2 for clamping the film, and measuring after the stage of high variability has passed (t >1200 s). Additionally, this modified BC has allowed the indirect estimation of stress accumulated in the ZnO lattice during measurements, offering a reliable and repeatable method for the determination of true d33 in crystalline thin films.https://doi.org/10.1002/apxr.202300091Berlincourtpiezoelectric materialsquasi‐static methodthin filmszinc oxide |
| spellingShingle | Manuel Pelayo Garcia Desmond Gibson Dave Allan Hughes Carlos Garcia Nuñez A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films Advanced Physics Research Berlincourt piezoelectric materials quasi‐static method thin films zinc oxide |
| title | A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films |
| title_full | A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films |
| title_fullStr | A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films |
| title_full_unstemmed | A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films |
| title_short | A Refined Quasi‐Static Method for Precise Determination of Piezoelectric Coefficient of Nanostructured Standard and Inclined Thin Films |
| title_sort | refined quasi static method for precise determination of piezoelectric coefficient of nanostructured standard and inclined thin films |
| topic | Berlincourt piezoelectric materials quasi‐static method thin films zinc oxide |
| url | https://doi.org/10.1002/apxr.202300091 |
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