5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications

Abstract Wireless local area network (WLAN) has gained widespread application as a convenient network access method, demanding higher network efficiency, stability, and responsiveness. High-performance filters are crucial components to meet these needs. Film bulk acoustic resonators (FBARs) are idea...

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Bibliographic Details
Main Authors: Tingting Yang, Chao Gao, Yaxin Wang, Binghui Lin, Yupeng Zheng, Yan Liu, Cheng Lei, Chengliang Sun, Yao Cai
Format: Article
Language:English
Published: Nature Publishing Group 2024-11-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00820-3