Exploring the high-temperature deformation behavior of monocrystalline silicon – An advanced nanoindentation study
Knowing the mechanical behavior of silicon at elevated temperatures is crucial for many high-temperature applications and processes. This work aims to expand the knowledge of these properties, especially on length scales relevant to miniaturized silicon structures. Therefore, nanoindentation experim...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
|
| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127523006135 |